TYPE

P/N

Description

Tool Maker

Remark

Ceramic Plate

0010-27430

MCA ESC, 300MM (12" HTESC)

AMAT

Ceramic Plate

0010-22985

300MM MCA ESC ASSY

AMAT

Ceramic Plate

0010-27983

HTB2 MCA ESC Heater Assy, 300mm

AMAT

Ceramic Plate

0010-27431

300MM PIB HT BESC ASSY

AMAT

Ceramic Plate

0010-24456

MCA E-CHUCK HTR, 300MM FDR SLT ESC

AMAT

Ceramic Plate

0010-33488

300mm Endura Puck ESC Assy

AMAT

Ceramic Plate

0040-48594

HDPCVD ESC, 300MM DUAL HE

AMAT

Ceramic Plate

839-102001-136

ELECTROSTATIC CHUCK

LAM

839-102001-136 revE/719-102001-066 revC

Ceramic Plate

839-800327-438

FlexDX(Core) ESC

LAM

Ceramic Plate

839-440462-306

ELECTRODE, LOWER CAP, ESC

LAM

ASSY-CAP-ELCTD-ESC CHUCK-6"-SEMI (LAM)

Ceramic Plate

718-094756-061

ELECTRODE,UPPER 6"ESC

LAM

Ceramic Plate

839-800327-432

FlexDX ESC Chuck

LAM

Ceramic Plate

839-800327-315

ETCH FLEX TALON ECT. LAM 2300 ESC 300MM

LAM

Ceramic Plate

839-019090-374

Kiyo45 Metal45 ESC Chuck

LAM

Ceramic Plate

839-019090-328

ECHUCK328 SPUTTERING TARGET, 300MM

LAM

ESC,TUNABLE,V2.3,300MM,HE HOLES IN

Ceramic Plate

839-019090-620

ELECTROSTATIC CHUCK

LAM

Ceramic Plate

839-800328-300

ELECTROSTATIC CHUCK

LAM

Ceramic Plate

719-101612-887

ELECTROSTATIC CHUCK

LAM

Ceramic Plate

839-101612-885

ELECTROSTATIC CHUCK

LAM

Ceramic Plate

839-102001-136

839-102001-136 revE/719-102001-066 revC

LAM

Ceramic Plate

839-440462-306

ASSY-CAP-ELCTD-ESCCHUCK-6"-SEMI(LAM)

LAM

Ceramic Plate

839-440462-306

ASSY-CAP-ELCTD-ESC CHUCK-6"-SEMI(LAM)

LAM

Ceramic Plate

839-019090-328

ESC,TUNABLE,V2.3,300MM,HE HOLES IN

LAM

可提供的ESC & Heater（OEM NEW）

TYPE

P/N

Description

Tool Maker

Remark

Metal

02-292391-00

Altus Pedestal 12" (STD VCR)

LAM

Altus

Metal

19-00154-00

Heater Block 8"

LAM

C2

Metal

02-384125-00

Vector Extreme Pedestal 12" Thin

LAM

Vedcor

Metal

303-05255-00

Mattson Heater Block（LSI）

Mattson

Metal

0010-03244

HP+TXZ HEATER

AMAT

Ceramic Plate

0010-59788

AIN Heater(STD)12"

AMAT

PRODUCER

Ceramic Plate

0010-59798

AIN Heater(STD)12"

AMAT

PRODUCER