| 类型 | 描述 | 料号 | 机台品牌/型号 |
| RPSC | RPS GENERATOR,CIP,ASTRIN EX | 0190-40602 | AMAT P110S PRSE;AMAT P100S PRGT |
| RFG | RF GEN 6KW,13.56MHZ PARAMOUNT 3PH | 0190-48055 | AMAT P100S CNTRS;AMAT P100S SYM3 |
| RFG | GEN RF 13.56MHZ PARAMOUNT 1513 | 0190-33823 | AMAT P100S CNTRS |
| DC | HIGH VOLTAGE DC POWER SUPPLY..HV-PS8C | ES 2L80-000558-22 | TEL P100S VIGUSLK3;TEL P100S VIGUSRK;TEL P100S VIGUSRK4 |
| RFG | GEN RF 13.56MHZ 1.5KW PARAMOUNT 1513 | 0190-44073 | AMAT P100S CNTRS;AMAT P100S SYM3 |
| RFG | RFG 2MHZ,5KW,AE PARAM | 0190-44105 | AMAT P100S CNTRS |
| MATCH | RF MATCH 13.56MHZ,4KV,50A AE NVIGATR5513 | 0190-15207 | 1488plus;AMAT P100S PROD |
| MATCH | MATCH DRM OX MWD-55LD | ES 3D80-000076-14 | TEL P100S DRM |
| MATCH | ASSEMBLY,RF,MATCH SUB ZERO(SZ) | 0010-02977 | AMAT P1264 CSB;AMAT P100S END |
| MATCH | ASSY,RF MATCH 300MM PRECLEAN/RPC PVD | 0010-21748 | AMAT P100S END |
| MATCH | RF BIAS MATCH 13.56MHZ 3KV35A NAVIGATOR1 | 0190-52275 | AMAT P100S PROD;AMAT P100S ADVTG |
| MATCH | ASSY,HIGH EFF.RF MATCH 300MM PRECLEAN | 0010-52034 | AMAT P100S END |
| RFG | HIGH VOLTAGE DC POWER SUPPLY..HV-PS8 | ES 2L80-000558-41 | TEL P100S VIGUSRK4;TEL P100S VIGUSRK;TEL P100S VIGUSLK3 |
| RFG | GEN PRMT,13.56MHZ,3KW PULSE | 660-078399-205 | LAM P100S KMCX;LAM P100S KFX;LAM P100S EXEL;LAM P100S XLAN;LAM P100S KIYO;LAM P120S KFXCVT |
| MATCH | RF MATCHER REPAIR | 3D39-050097-V1 | TEL P100S SCCM;1488plus |
| RFG | 2MHZ,15KW,PULSE,10KHZ,LVL_LVL | 660-144976-004 | LAM P100S XLAN;LAM P100S EXEL;LAM P100S FLXFXP;LAM P100S KMCX;LAM P100S KFX |
| RFG | 13.56MHZ,1.25KW,480VAC REPAIR | 0190-25529 | AMAT P100S END |
| MATCH | FRU,MATCH,BIAS,MMP,W/O ZSCAN | 832-129731-015 | 1488plus;LAM P120S KFXCVT |
| RFG | GEN RF 13.56MHZ 1.5KW PARAMOUNT ,3PHAS | 0190-53527 | AMAT P100S SYM3;AMAT P100S CNTRS |
| RFG | TCP RF GEN | 660-032596-213 | LAM P100S KIYO;1488plus;LAM P100S KMCX |
| RFG | 60MHZ 2.7KW OVTN 2760 3PHS 208VAC | 0190-17779 | AMAT P100S PROD;1488plus |
| RFG | FILTER,UPPER DC..RF FILTER-TW6 | ES 2L80-000951-22 | TEL P100S VIGUSRK;TEL P100S VIGUSRK4 |
| DC | HIGH VOLTAGE DC POWER SUPPLY REPAIR | ES2L80-000558-32 | TEL P100S VIGUSRK;TEL P100S VIGUSLK3;TEL P100S VIGUSRK4 |
| RFG | HV BOX FR B | 2L80-000558-32 | TEL P100S VIGUSRK4;TEL P100S VIGUSRK;TEL P100S VIGUSLK3 |
| MATCH | ASSY,HI EFF,RF MATCH-BIAS W/IMPROV,SIP* | 0010-52033 | AMAT P100S END |
| RFG | GEN,LOW FREQ,COMDEL,CLX 2750,430KHZ | 27-414821-00 | NVLS P100S VEXP;ULVAC P100S ENT;NVLS P100S VEXT |
| RFG | GEN,60MHZ,PULSED | 660-210105-200 | LAM P100S FLXFXP;LAM P120S FLXHXP |
| RFG | GEN,60MHZ,6KW,PULSE,10KHZ REPAIR | 660-189197-001 | LAM P100S KFX;LAM P100S FLXFXP;LAM P100S EXEL;LAM P100S KMCM;LAM P100S XLAN |
| RFG | POWER GENERATOR,RF | ES 2L39-000137-11 | TEL P100S VIGUSLK3 |
| MATCH | CONTROLLER,MATCHING | ES 2L39-000138-11 | TEL P100S VIGUSLK3 |
| RPSC | RPS GENERATOR,CIP,ASTRIN 2L | 0190-41326 | AMAT P100S PRXP;AMAT P100S PRGT3;1488plus;AMAT P100S PRGT |
| DC | POWER SUPPLY DC HPK6R3ZI-TE8-PULSE | ES 2L39-000046-25 | TEL P100S VIGUSRK4;TEL P100S VIGUSRK;TEL P100S VIGUSLK3 |
| MATCH | CONTROLLER MATCHING FTM-80A1 | ES 2L39-000039-26 | TEL P100S VIGUSLK3;TEL P100S VIGUSRK |
| RFG | GEN RF 60M 2.7KW 3PHASE 208VAC | 0190-55999- | AMAT P100S PROD |
| RFG | POWER RFG JFK85TH-TC6 | ES 2L39-000048-64 | TEL P100S VIGUSRK;TEL P100S VIGUSLK3 |
| RFG | POWER RFG FGA-30G1 | ES 2L39-000099-32 | TEL P100S VIGUSRK |
| RFG | AE NAVIGATOR Ⅱ 13/60MHZ RF | 0190-42282 | 1488 PLUS;AMAT P100S PROD |
| RFG | GEN CB5000 13.56MHZ | 660-271742-001 | NVLS P100S VEXT;NVLS P100S SABRE |
| RFG | UPGRADE TCP GEN | 660-078399-208 | LAM P100S KIYO;LAM P100S KFX |
| RFG | GEN RF PRMNT 13.56MHZ 1.5KW PULSING | 660-088884-002 | 1488 PLUS;LAM P100S KIYO |
| DC | DC PWR SUPPLY 20KW,480VAC | 0190-25692 | AMAT P1264 CSB;AMAT P100S END |
| RPSC | GEN RPS ASTRON 11KW 8L | 660-249173-001 | NVLS P100S ALT |
| RFG | GEN RF 1.25KW 480VAC 13.56MHZ | 0190-25527 | AMAT P100S END;AMAT P1264 C4 SPU |
| RFG | GEN 60MHZ,PULSED | 660-210105-200 | LAM P110S FLXFXP;LAM P120S FLXHXP |
| MATCH | CONTROLLER MATCHING AMN-50B2 | ES3D80-000793-15 | 1488 PLUS;TEL P100S SCCM |
| RFG | POWER GEN FGA-30C | ES2L39-000047-13 | TEL P100S VIGUSRK |
| RFG | GEN RF 13.56MHZ APEX 1513 | 0190-19022 | AMAT P100S ADVTG |
| RFG | GEN 400KHZ | 660-210103-200 | LAM P120S FLXHXP |
| RFG | GEN 13.56MHZ APEX 3013 | 0190-54373 | AMAT P100S ADVTG |
| MATCH | MATCH 13.56MHZ NAVIGATOR Ⅱ1013L35 1.5KW | 0190-44075 | AMAT P100S CNTRS |
| RFG | 13.56/2MHZ 1KW 440/480VAC | 0190-40655 | AMAT P100S END |
| MATCH | MATCH RF ERM | 660-051990-005 | LAM P100S COR;KFX;EXEL;XLAM;KMCX |
| RFG | RFG 2MHZ 5KW AE PARAMOUNT | 0190-53530 | AMAT P100S CNTRS |
| MATCH | MATCH DRM OX WMD-55LD | ES3D80-000076-V6 | TEL P100S DRM;TEL P100S SCCM |
| MATCH | HP MATCH 400KHZ | 660-243033-004 | NVLS P100S VEXT |
| MATCH | 60MHZ/2MHZ MATCH AMN-50B2 | ES3D80-000793-14 | TEL P100S SCCM;1488 PLUS |
| RFG | GEN 400KHZ PULSED | 660-210103-200 | LAM P110S FLXFXP |
| RFG | GEN 13.56MHZ RFG-1251 | 660-024637-200 | LAM P100S COR |
| RFG | RFG RF PLASMA 6500 | 27-438022-00 | NVLS P100S VEXT |
| DC | PW SPLY 40A 48V 2000W | 27-282099-00 | NOVELLUS P1264 SABRE |
| MATCH | MATCH 2-60MHZ | 853-040482-625 | LAM P100S KFX;EXEL;XLAM;KMCX;FLXFXP |
| MATCH | RF BIAS MATCH 13/2MHZ,60/20ARMS | 0190-46867 | AMAT P100S CNTRS;AMAT P100S SYM3 |
| RFG | RFG 1.25KW 480VAC 13.56MHZ | 0190-49002 | AMAT P100S END |
| DC | POWER SUPPLY DC | ES2L39-000021-31 | TEL P100S VIGUSLK3 |
| DC | DC PWR SUPPLY 20KW 480VAC | 0190-34646 | AMAT P100S END；AMAT P1264 CSB |
| RFG | GEN 27MHZ 3000W | 660-002294-002 | LAM P100S EXEL |
| RFG | MF RF 900W 350KHZ | 0190-08677 | 1488 PLUS |
| MATCH | MATCH NETWORK 1.985MHZ | E19312120 | 1488 PLUS |
| MATCH | FRU ASSY BIAS MATCH | 832-038915-103 | LAM P100S KIYO |
| RFG | BIAS RF | 660-244566-121 | LAM P100S KIYO |
| MATCH | MATCHER | 3D80-000076-V5 | TEL P100S DRM |
| MATCH | BIAS MATCH | 832-038915-203 | LAM P100S KIYO |
| RFG | GEN RF PDX Ⅱ 3000 | 27-404020-00 | LAM P100S FLXFXP |
| MATCH | RF MATCH 13.56MHZ NAVIGATOR 3013 | 0190-27579 | AMAT P100S ADVTG |
| RPSC | GEN RPC R ASTRON 8L HI FLOW | 27-425457-00 | NVLS P100S ALT |
| RFG | WGA-50E 2M/5MHZ | ES3D80-000602-14 | TEL P100S SCCM |
| DC | DC PWR SUPPLY 20KW 480VAC | 0190-61052 | AMAT P100S END |
| RFG | RFG HFK15Z-TW1 | MB3M80-000989-15 | TEL P100S TRIAS |
| MATCH | ENCL MATCH 400KHZ | 853-040482-685 | LAM P120S FLXFXP |
| MATCH | MATCH 400-60MHZ | 853-040482-680 | LAM P100S FLXFXP |
| MATCH | MATCH 400KHZ | 853-040482-682 | LAM P120S FLXFXP |
| RFG | POWER RFG JFK85TH-TC6 | ES2L39-000048-65 | TEL P100S VIGUSRK |
| DC | DC GEN | 0190-61053 | AMAT P100S END |
| RFG | TCP RFG | 660-244566-008 | LAM P100S KIYO |
| RFG | 60MHZ/5KW AGA-50B2 | ES3D80-000601-14 | TEL P100S SCCM |
| MATCH | TCP MATCH | 660-243028-017 | LAM P100S KIYO |
| RFG | UPGRADE BIAS GEN | 660-078399-108 | LAM P100S KIYO |
维修流程：
维修测试平台：
地址：3rd Floor, Building F4, Phase II of Innovation Industry Park, No. 2800 Innovation Avenue, Hefei City
电话：18013823227
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