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品牌料号描述
AMAT0200-09201ASP QZ GDP 85 HOLE   85'(85^?L)
0200-09444CAP,TOP ,QTZ 25MM   TUBE,ASP PRSP3(1^L)
0200-09478PLATE,GAS   DIST,UPPER,200MM ASP PRSP3(5L)
0200-36680ASP QZ LINNER   UPPER(小环)
0200-36682LINER quartz lower   gas dist ground(大环)
0200-05376QTZ TUBE, ASP+
0200-01463SHADOW RING   QUARTZ,  63Ra 200EMAX
0200-00925COVER   RING,QUARTZ,THICK,45°,200mm,eMax
0200-02124L-SHAPE COVER   RING,63Ra 200mm eMax
0200-10073INSULATOR,QUARTZ,200mm,SIMPLE   CATHODE
0200-01118WINDOW,QUICK RELEASE   ENDPOINT WINDOW
0200-02619TOP RING,
    QUARTZ,THICK,63Ra
    ,45°WALL,200mm,eMax
0200-03170BARRIER RING,   QUARTZ,
    300mm,IA;BARRIER
0200-04826BOTTOM   RING,QUARTZ,
    FLAME POLISHEO
0200-03574RING QUARTZ STEPPED  
    PRODUCER ETCH
0200-02542RING INSULATOR   STEPPED
    PRODUCER ETCH
0200-05959SINGLE RING QUARTZ   .09
    HEIGHT .12 RECESS DPSII
0200-35292WINDOW,ENDPOINT DPS   MEC
0200-35293Window,Manometer
0200-09447Upper plate上板
0200-09448Lower quartz   plate下石英板
0200-00410UNI-INSERT GAS   DISTRIBUT
0200-35801WINDOW RECESSED   ENDPOINT 4MM APERTURE
0200-35334WINDOW
0200-01119SHADOW RING QUARTZ,   200MM NOTCH(2) TG,SUPER-E
   



TEL2L05-350463-11RING(LAB),COVER 6.8 MP
2L05-350037-11COVER RING,360.9 Q V2
2L05-250059-11RING,INSULATOR OR   FLAT Q V2E
2L05-350038-11RING QZ GND 5.0-T16.5   Q V2
2L05-250058-11RING INSULATOR IR   FLAT 1 V2E
2L05-500979-11P0033296cover ring
2L05-500869-11P0031599 inner lR
2L05-350480-11RING(OR),QZ UNDER   VIX-MP
2L05-250034-11RING,SHIELD   TOP-H(PH-TU)V2
2L05-250470-11RING,INSULATOR OR   VIX-MP
2L05-350306-11RING,QZ-GND 5.0-T16.5   VIX-MP
2L05-350343-11RING,INSULATOR IR   VIXMP
2L05-500026-11RING(LAB),COVER 10.3   MP
2L05-350512-11RING,INSULATOR IR   VIX-MP
2L05-350511-11RING,QZ UNDER   VIX-MP-LWR
2L05-350509-11RING,COVER VIX-MP
2L05-350510-11RING,QZ UNDER   VIX-MP-UPR
2L05-350499-11RING,INSULATOR FRTC 2   A
2L05-350351-11RING,INSULATOR CONVEX   FRTC
2L05-350498-11RING,COVER 360.5  FRTC 2
2L05-350500-11RING,INSULATOR FRTC 2   B
2L05-250615-11RING,SR FLAT TOP-GND
2L05-251155-11RING SHIELD TOP DC1
2L05-500075-11RING INSULATOR CONVEX   HB
2L05-351208-11RING COVER 360
3D05-350028-11INSULATOR,ESC   ENCLOSURE,FG8
3D05-350027-11INSULATOR RING , FG8
3D05-250025-11RING,SHIELD UPPER,   STRAIGHT
3D05-300243-11COVER RING,360.9
1805-220177-22RING,SHIELD(HARD-LDXH6)(SCCM-OX)
1805-320140-11COVER   RING,INNER(MTBWC250)(SCCM-Ox)
1805-320141-11COVER   RING,OUTER(MTBWC250)(SCCM-Ox)
1805-320142-11BASE RING
1805-220135-23RING,EXH,OUTER(EPD)(H6)(SCCM-Ox)
1805-220177-12RING,SHIELD(HARD-LD)
    (MS TYPE)
1805-320125-11COVER   RING,INNER(D260)(SCCM-Ox)
1805-320126-21INNER(D260)(SCCM-Ox)
1805-220135-13RING EXT OUTER
1805-320127-11BASE RING   INTEGRATED(D260)
1A10-450874-11WINDOW
1D05-300188-12Ring Insulator A1   下电极石英隔离环
1D05-300053-14Ring Insulator B   下电极石英隔离环
1D05-300190-12Ring Insulator A2
1805-320110-31COVER RING INNER   (H6)(SCCM-Ox)



LAM716-331088-001R,EDGE,8 IN,ES,NCH,TOP,QTZ
716-031052-0020
716-011009-001QTZ,WINDOW EOP
716-331157-004QUARTZ DISK(HPQ)
716-331142-007EDGE Ring,HPQ
716-028454-012DISK, QUARTZ
716-330915-003Low ESC CAP
716-331142-001top edge ring顶部边缘环
716-443179-102base edge ring底边环
716-331157-014top disk顶盘
716-087943-832COV,QTZ,05X,TES,TALL,14.06D
716-004655-001RING,QUARTZ,UPPER
716-443083-004RING, CONFINEMENT,   TOP
716-443084-003RING,CONFINEMENT,BOTTOM
716-443189-002RING COVER ,QTZ,HP
716-443230-002CONFINEMENT   RING,
    ONE PIECE,HP
716-443090-010RING QTZ UPPER HP
716-013344-006RING,COVER,OUTER,GND
716-013402-008COV,H/E RING,QTZ
716-013344-009RING.COVER,OUTER.GND
716-017112-330COV,H/E RING,QTZ
716-014849-303RING,WAP,QTZ,GENERIC,17,   07ID,300MM
716-067739-105RING,QTZ,COVER BKG   PL,UPR ELCTD
716-013402-003COV,H/E RING,QTZ
716-801568-002OES Window
716-011969-002RING,QTZCOUPLING,300MM
716-803156-004B,FOC R CVR,DFC 300MM
716-801667-003WINDOW
716-022030-004SLV,QTZ,STEPPED,PIN,DC   BIAS
716-027740-001WIN,QTZ
716-014843-353RING,WAP,QTZ,GENERIC,17IN,DFC
716-088516-003P0038887HXE16 CAM   -PCR
716-012639-024NOZ.8 RDL-1 CTR   HOLE,QTZ
716-012640-012TCP window,Quartz   disk;TCP
716-031257-534RING,EDGE,TOP,EBP,300MM
716-031257-662RING, EDGE, COMBO,   QTZ, 300MM
716-080139-012RING, EDGE, BOT, WRAP
716-080138-015RING, EDGE, TOP, WRAP
716-012639-117喷嘴
716-031257-531RING,EDGE,TOP,
    QTZ,EBP,300MM
716-801306-008DISK, QUARTZ
716-008718-001NOZ,GAS INJ,8-HOLE   QTZ,2300 METAL
716-026652-911RING,EDGE.BOT,200-300MM
716-013423-007QUARTZ LINER,LID   OPNG,2300 M



AMEC625-00147-054RING,ISOLATION,0.570 QTZ
625-00007-019INSULATION   RING,BTM,COOLED
625-00625-002INSERT RING,THK 2.8
625-00117-011COVER RING ,THICKER
625-00147-000RING,ISOLATION,QTZ,
    MOVERTING
625-00117-110COVER RING THICKER   TOP Ra8
625-00184-004UPPER COVER RING
625-00930-000QUARTZ PLUG
    PROCESS KIT,ICP
625-00927-004-P01FOCUS RING4 PROCESS   KIT , SSC ICP



KE3HOT045180OUTER RING (P)
3HOT045115SHOWER PLATE 175
3HOT045156GATE COVER (P)
3HOT045164EXH COVER (P)
3HOT045214300 LOWER WALL (A)
3HOT045222300 LOWER WALL (B)
3HOT045230300 INNER RING
3HOT059850300 PIN STAND (S)
3HOT045198BOLT COVER
3HOT048416HEATER COVER LO
4HOT013715FULL COVER



NAURA10140-001871AFocus Ring T3-C-IC
10140-001582BSBase Ring T2-C
10140-000169AS喷嘴
10140-000999DOES
10140-000718EQTZ WINDOW T2 DISK
10140-001582ABase ring
12001-000003AIEP window
10140-001763A保护窗_N Window shield
10140-001764A观察窗_N View Window
10140-001765AOES套筒 OES Sleeve
10140-000998BOES观察窗
10140-000658B基环_DM_IC
10110-657725AStrip Dual Injector
10140-000566AQtz View port window
10140-001618AIEP检测窗
10140-000995BIEP检测窗_T1
10140-002236A石英
10140-002237A石英
10140-002238A石英



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