Metal parts-Anhui Ruixin Zhiyan Semiconductor Technology Co., Ltd

parts

可提供产品

brand	Part number	describe
AMAT	0040-95475	FACEPLATE,HIGH DEP RATE,TEOS
	0021-42136	Showerhead
	0041-25016	·harp faceplate
	0020-49785	FACEPLATE,ALUMINUM,APF
	0020-84596	FACEPLATE,SILANE,FLOW TESTED
	0041-13896	FACEPLATE,26 MIL CENTERHOLE
	0021-26544	BLOCKER,TEOS HI DEP RATE,CH
	0021-46364	Blockplate
	0021-92064	harp block
	0020-63185	BLOCKER PLATE,UNIFORM FLOW,CH
	0020-70842	BLOCKER PLATE,SIH4，BP GB
	0021-47453	BLOCKER,SD1325 300MM，SACVD
	0042-46052	PEDESTAL ADAPTER, CHILLER, ENDURA2, 300MM
	0042-46052	PEDESTAL ADAPTER, CHILLER, ENDURA2, 300MM
	0051-15137	＂MANIFOLD, OUTLET, ESC BSP,PVD, ENDURA2＂
	0041-44934	＂SUPPORT BAR,GAS STICK,ENDURA2＂
	0041-02659	ADAPTER, 300MM PC XTTURBO／XTE ENDURA2
	0042-23312	ADAPTER, WATER-COOLED,STD PVD, 300MM ENDURA2
	0042-23312	ADAPTER, WATER-COOLED,STD PVD, 300MM ENDURA2
	0042-23312	ADAPTER, WATER-COOLED,STD PVD, 300MM ENDURA2
	0020-05749	ADAPTOR W／B LOADLOCK ENDURA I／F
	0270-10175	ASSEMBLY, CENTER JIG SICONI PRECLEAN CVD 300MM ENDURA2,
	0270-06744	BAR, PVD PROCESS HEIGHT MEASUREMENT,ENDURA 300MM
	0042-23889	BASE,HINGE,SOURCE,DPX ENDURA 300MM
	0020-62133	BLANK-OFF POSITION E 200MM ENDURA
	0021-76740	BRACKET BUFFER LID ENDURA
	0020-26912	BRACKET CABLE MOUNTING ENDURA LID
	0040-21245	BRACKET MOUNTING CIR CONN ENDURA LID
	0040-80022	CHAMBER MONOLITH W／LCF 300MM ENDURA,
	0020-85684	CLAMP LIFT PIN CH-AB 300MM ENDURA,
	0042-24324	CLAMP RING, CHAMBER LINER, Y2O3 COAT, DPX ENDURA 300MM
	0042-24324	CLAMP RING, CHAMBER LINER, Y2O3 COAT, DPX ENDURA 300MM
	0042-53675	DS HUB, DZ HEATER, 300MM, ENDURA 2,
	0042-13130	DUAL MANIFOLD, SPIRAL LID, CVD／ALD, ENDURA 300MM
	0042-13130	DUAL MANIFOLD, SPIRAL LID, CVD／ALD, ENDURA 300MM
	0042-13130	DUAL MANIFOLD, SPIRAL LID, CVD／ALD, ENDURA 300MM
	0050-84507	GAS CROSSOVER AFEOL CLEAN 300MM ENDURA2
	0010-50867	GAS STICK, ENDURA2
	0010-50867	GAS STICK, ENDURA2
	0010-50867	GAS STICK, ENDURA2
	0010-50867	GAS STICK, ENDURA2
	0050-87952	GASLINE ARGON INTEGRATION ENDURA2 CR
	0050-87952	GASLINE ARGON INTEGRATION ENDURA2 CR
	0050-87952	GASLINE ARGON INTEGRATION ENDURA2 CR
	0050-87781	GASLINE ENDURA2 AB VENT CR
	0050-87950	GASLINE VENT INTEGRATION ENDURA2 CR
	0051-15138	GASLINE, 1／2＂, ESC BYPASS PLT, ENDURA2
	0050-85224	GASLINE, CHAMBER N2 SUPPLY, CVD 300MM ENDURA2
	0050-86772	GASLINE, FLEXLINE, PEDESTAL,CVD ENDURA2
	0051-88627	GASLINE, FLEXLINE, PEDESTAL,CVD ENDURA2
	0050-86772	GASLINE, FLEXLINE, PEDESTAL,CVD ENDURA2
	37533-855	GASLINE,FLEXLINE,PEDESTAL,CVDENDURA2
	0040-98024	GIMBAL, PEDESTAL LIFT, 300MM CVD ENDURA2
	0020-75465	HOOP UNIVERSAL, 300MM ENDURA 2 P5
	0020-75465	HOOP UNIVERSAL, 300MM ENDURA 2 P5
	0020-75465	HOOP UNIVERSAL, 300MM ENDURA 2 P5
	0022-43475	HOOP UNIVERSAL, 300MM ENDURA 2 P5
	0041-78686	HUB, DZ HEATER WITH LONGER PINS, 300MM, ENDURA 2
	0041-78686	HUB, DZ HEATER WITH LONGER PINS, 300MM, ENDURA 2
	0040-76663	INSERT, CHAMBER INTERFACE, 300MM ENDURA, .210 ORING
	0040-99800	JIG, CENTERING SICONI PRECLEAN 300MM CVD ENDURA2
	0042-03222	JIG,CENTERING,SICONI PRECLEAN 300MM CVD ENDURA2
	0042-19379	LID, CLDWN CH, ENDURA FULL OBM
	0042-19379	LID, CLDWN CH, ENDURA FULL OBM
0050-83269	LINE, INTEGRATION, RPC, ENDURA BLUE
0050-83269	LINE, INTEGRATION, RPC, ENDURA BLUE,
0040-46456	LINER LOWER W-ALN 300MM ENDURA SL
D130246	MONOLITH,ENDURA DUAL BLADE ROBOT
D130246	MONOLITH,ENDURA DUAL BLADE ROBOT
0042-46052	PEDESTAL ADAPTER, CHILLER, ENDURA2, 300M
0022-10587	RING COVER EXTENDED PVD LAMP REFLOW 300MM ENDURA2
0042-21001	RPS MANIFOLD, BOTTOM, DNP, CVD, ENDURA
0042-32112	RPS MANIFOLD, BOTTOM,DNP, CVD, ENDURA
0042-33659	RPS MANIFOLD, BOTTOM,DNP, CVD, ENDURA
0042-32116	RPS MANIFOLD, TOP, DNP,CVD, ENDURA
0042-32112	RPS MANIFOLD, BOTTOM,DNP, CVD, ENDURA
0020-89827	SHIELD OUTER, ALD／CVD 300MM ENDURA2
0022-79583	SHIELD OUTER, ALD／CVD 300MM ENDURA2
0020-89827	SHIELD OUTER, ALD／CVD 300MM ENDURA2
0022-79583	SHIELD OUTER, ALD／CVD 300MM ENDURA2
0040-23915	SLEEVED CAP HP+ ROBOT WRIST ENDURA TRANSFER
0270-76085	STAND,CENTURA／ENDURA LLK ASSEMBLY
0041-44934	SUPPORT BAR, GAS STICK, ENDURA2
0041-44934	SUPPORT BAR, GAS STICK, ENDURA2
0042-32114	TOP HEATER BASE, DNP,CVD, ENDURA
0041-04778	TRANSFER CHAMBER, 200MM ENDURA
0041-04778	TRANSFER CHAMBER, 200MM ENDURA
0041-04778	TRANSFER CHAMBER, 200MM ENDURA
0050-86944	WATER RETURN,PEDESTAL,300MM CVD ENDURA2
0050-86945	WATER SUPPLY,PEDESTAL,300MM CVD ENDURA2
0042-13067	WATERBOX, SPRIAL SH,CVD／ALD, ENDURA, 300MM
0041-44934	安装底板,SUPPORT BAR, GAS STICK, ENDURA2

LAM	715-031984-003	PL.WDO CHMBR/小side wall，chamber边窗
	715-032012-006	9600DFM big side wall/chamber边窗
	839-031054-012	RTNR,UNIV WDO,CAPTIVE HDW,BUMP,ENH/chamber边窗盖板
	715-330745-004	HSG,BELLOWS,IMP ALIGN,HARD STOP/BSR底座
	715-330778-003	RNG,RET,BLLWS.IMP ALIGN/BSR 固定bellow外套
	715-020787-001	NUT,KNURL,ALUM,3/8-24X1/8LG/底部固定螺母，红框内的parts
	715-001874-001	SCR,ADJ,BLWS/底部调节螺母，不包括红框内的parts
	715-330984-011	LAM 9400 DFM groundring
	715-015169-011	LAM 9400 DFM chamber liner
	715-032012-010	PL.WDO CHMBR,CAPTIVE HDW,A6/chamber边窗
	715-032012-010	PL.WDO CHMBR,CAPTIVE HDW,A6/chamber边窗
	715-330745-003	HSG,BELLOWS,IMP ALIGN,HARD STOP/BSR底座
	857-101101-001	KIT,SEAL,SOCKET,CAM
	857-101101-002	KIT,SEAL,SOCKET,CAM
	713-067673-002	PIN
	714-045744-008	LINER,CANTILVR,OOUR LNR MNT.23
	839-802923-006	ASS,WINDOW VIEW PORT
	713-082885-002	SPCR PTFE,SGI
	719-333020-010	PKG,SHIM,ANTI-WALK,BOT,RING
	715-042721-810	LINER,SYM, HI FLOW, 2300
	714-045743-809	LINER,FIXED OUTR,ACME,2300
	715-801021-012	metal chamber liner
	715-042721-885	LINER,SYM,HI FLOW,2300,SRC
	715-045710-828	DOOR,SYM,CHMBR,2300
	713-085131-001	TUBE,TEFLON,.25 0D,LINER 2300
	713-065829-001	COV,SCRW,SRC LINR
	839-033318-001	Al Liner chamber upper
	715-330987-401	接地环
	716-080973-404	上边缘环

TEL	YANDONG-001	SLIT..EXT PLATE
	YANDONG-002	slit line
	YANDONG-003	Cover screw Aluminum
	YANDONG-004	wall aluminum chamber（UP）
	YANDONG-005	wall aluminum chamber（LOW）
	1810-121085-16	shield depo ALUMINUM（PC1）
	1810-223352-11	COVER Wall CHAMBER BOTTOM（GND）
	YANDONG-006	EPD window
	YANDONG-007	Upper holder E
	1810-324309-11	bellows cover B

NAURA	10110-652599D	内衬_300_D（Liner）
	10110-652600C	内门_300_D（Inner door）
	10010-010720E	匀流腔装配-B（Gas Uniform Ring）

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