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品牌料号描述
AMAT0040-95475FACEPLATE,HIGH DEP RATE,TEOS
0021-42136Showerhead
0041-25016·harp faceplate
0020-49785FACEPLATE,ALUMINUM,APF
0020-84596FACEPLATE,SILANE,FLOW TESTED
0041-13896FACEPLATE,26 MIL CENTERHOLE
0021-26544BLOCKER,TEOS HI DEP RATE,CH
0021-46364Blockplate
0021-92064harp block
0020-63185BLOCKER PLATE,UNIFORM FLOW,CH
0020-70842BLOCKER PLATE,SIH4,BP GB
0021-47453BLOCKER,SD1325 300MM,SACVD
0042-46052PEDESTAL ADAPTER, CHILLER, ENDURA2, 300MM
0042-46052PEDESTAL ADAPTER, CHILLER, ENDURA2, 300MM
0051-15137"MANIFOLD, OUTLET, ESC BSP,PVD, ENDURA2"
0041-44934"SUPPORT BAR,GAS STICK,ENDURA2"
0041-02659ADAPTER, 300MM PC XTTURBO/XTE ENDURA2
0042-23312ADAPTER, WATER-COOLED,STD PVD, 300MM ENDURA2
0042-23312ADAPTER, WATER-COOLED,STD PVD, 300MM ENDURA2
0042-23312ADAPTER, WATER-COOLED,STD PVD, 300MM ENDURA2
0020-05749ADAPTOR W/B LOADLOCK ENDURA I/F
0270-10175ASSEMBLY, CENTER JIG SICONI PRECLEAN CVD 300MM ENDURA2,
0270-06744BAR, PVD PROCESS HEIGHT MEASUREMENT,ENDURA 300MM
0042-23889BASE,HINGE,SOURCE,DPX ENDURA 300MM
0020-62133BLANK-OFF POSITION E 200MM ENDURA
0021-76740BRACKET BUFFER LID ENDURA
0020-26912BRACKET CABLE MOUNTING ENDURA LID
0040-21245BRACKET MOUNTING CIR CONN ENDURA LID
0040-80022CHAMBER MONOLITH W/LCF 300MM ENDURA,
0020-85684CLAMP LIFT PIN CH-AB 300MM ENDURA,
0042-24324CLAMP RING, CHAMBER LINER, Y2O3 COAT, DPX ENDURA 300MM
0042-24324CLAMP RING, CHAMBER LINER, Y2O3 COAT, DPX ENDURA 300MM
0042-53675DS HUB, DZ HEATER, 300MM, ENDURA 2,
0042-13130DUAL MANIFOLD, SPIRAL LID, CVD/ALD, ENDURA 300MM
0042-13130DUAL MANIFOLD, SPIRAL LID, CVD/ALD, ENDURA 300MM
0042-13130DUAL MANIFOLD, SPIRAL LID, CVD/ALD, ENDURA 300MM
0050-84507GAS CROSSOVER AFEOL CLEAN 300MM ENDURA2
0010-50867GAS STICK, ENDURA2
0010-50867GAS STICK, ENDURA2
0010-50867GAS STICK, ENDURA2
0010-50867GAS STICK, ENDURA2
0050-87952GASLINE ARGON INTEGRATION ENDURA2 CR
0050-87952GASLINE ARGON INTEGRATION ENDURA2 CR
0050-87952GASLINE ARGON INTEGRATION ENDURA2 CR
0050-87781GASLINE ENDURA2 AB VENT CR
0050-87950GASLINE VENT INTEGRATION ENDURA2 CR
0051-15138GASLINE, 1/2", ESC BYPASS PLT, ENDURA2
0050-85224GASLINE, CHAMBER N2 SUPPLY, CVD 300MM ENDURA2
0050-86772GASLINE, FLEXLINE, PEDESTAL,CVD ENDURA2
0051-88627GASLINE, FLEXLINE, PEDESTAL,CVD ENDURA2
0050-86772GASLINE, FLEXLINE, PEDESTAL,CVD ENDURA2
37533-855GASLINE,FLEXLINE,PEDESTAL,CVDENDURA2
0040-98024GIMBAL, PEDESTAL LIFT, 300MM CVD ENDURA2
0020-75465HOOP UNIVERSAL,  300MM ENDURA 2 P5
0020-75465HOOP UNIVERSAL, 300MM ENDURA 2 P5
0020-75465HOOP UNIVERSAL, 300MM ENDURA 2 P5
0022-43475HOOP UNIVERSAL, 300MM ENDURA 2 P5
0041-78686HUB, DZ HEATER WITH LONGER PINS, 300MM, ENDURA 2
0041-78686HUB, DZ HEATER WITH LONGER PINS, 300MM, ENDURA 2
0040-76663INSERT, CHAMBER INTERFACE, 300MM ENDURA, .210 ORING
0040-99800JIG, CENTERING SICONI PRECLEAN 300MM CVD ENDURA2
0042-03222JIG,CENTERING,SICONI PRECLEAN 300MM CVD ENDURA2
0042-19379LID, CLDWN CH, ENDURA FULL OBM
0042-19379LID, CLDWN CH, ENDURA FULL OBM
0050-83269LINE, INTEGRATION, RPC, ENDURA BLUE
0050-83269LINE, INTEGRATION, RPC, ENDURA BLUE,
0040-46456LINER LOWER W-ALN 300MM ENDURA SL
D130246MONOLITH,ENDURA DUAL BLADE ROBOT
D130246MONOLITH,ENDURA DUAL BLADE ROBOT
0042-46052PEDESTAL ADAPTER, CHILLER, ENDURA2, 300M
0022-10587RING COVER EXTENDED PVD LAMP REFLOW 300MM ENDURA2
0042-21001RPS MANIFOLD, BOTTOM, DNP, CVD, ENDURA
0042-32112RPS MANIFOLD, BOTTOM,DNP, CVD, ENDURA
0042-33659RPS MANIFOLD, BOTTOM,DNP, CVD, ENDURA
0042-32116RPS MANIFOLD, TOP, DNP,CVD, ENDURA
0042-32112RPS MANIFOLD, BOTTOM,DNP, CVD, ENDURA
0020-89827SHIELD OUTER, ALD/CVD 300MM ENDURA2
0022-79583SHIELD OUTER, ALD/CVD 300MM ENDURA2
0020-89827SHIELD OUTER, ALD/CVD 300MM ENDURA2
0022-79583SHIELD OUTER, ALD/CVD 300MM ENDURA2
0040-23915SLEEVED CAP HP+ ROBOT WRIST ENDURA TRANSFER
0270-76085STAND,CENTURA/ENDURA LLK ASSEMBLY
0041-44934SUPPORT BAR, GAS STICK, ENDURA2
0041-44934SUPPORT BAR, GAS STICK, ENDURA2
0042-32114TOP HEATER BASE, DNP,CVD, ENDURA
0041-04778TRANSFER CHAMBER, 200MM ENDURA
0041-04778TRANSFER CHAMBER, 200MM ENDURA
0041-04778TRANSFER CHAMBER, 200MM ENDURA
0050-86944WATER RETURN,PEDESTAL,300MM CVD ENDURA2
0050-86945WATER SUPPLY,PEDESTAL,300MM CVD ENDURA2
0042-13067WATERBOX, SPRIAL SH,CVD/ALD, ENDURA, 300MM
0041-44934安装底板,SUPPORT BAR, GAS STICK, ENDURA2
0190-41359EMI GASKET
3320-01190RF Gasket
0190-43658EMI GASKET
0190-13874GASKET ID 20.30" WIDTH 0.285" GORE-BG TA
0020-83092GASKET 300MM REFLECTORPLATE SHEET
3320-01060EMI GASKET (4ft)
0020-34131BASE RF
3320-01170EMI Gasket (6ft)
0090-35133DPS POLYMIDE ESC(8"ESC)
0040-48594Applied Materials ESC 12"
0010-61190
(0041-83414)
AMAT Producer-e



LAM715-031984-003PL.WDO CHMBR/小side wall,chamber边窗
715-032012-0069600DFM big side wall/chamber边窗
839-031054-012RTNR,UNIV WDO,CAPTIVE HDW,BUMP,ENH/chamber边窗盖板
715-330745-004HSG,BELLOWS,IMP ALIGN,HARD STOP/BSR底座
715-330778-003RNG,RET,BLLWS.IMP ALIGN/BSR 固定bellow外套
715-020787-001NUT,KNURL,ALUM,3/8-24X1/8LG/底部固定螺母,红框内的parts
715-001874-001SCR,ADJ,BLWS/底部调节螺母,不包括红框内的parts
715-330984-011LAM 9400 DFM groundring
715-015169-011LAM 9400 DFM chamber liner
715-032012-010PL.WDO CHMBR,CAPTIVE HDW,A6/chamber边窗
715-032012-010PL.WDO CHMBR,CAPTIVE HDW,A6/chamber边窗
715-330745-003HSG,BELLOWS,IMP ALIGN,HARD STOP/BSR底座
857-101101-001KIT,SEAL,SOCKET,CAM
857-101101-002KIT,SEAL,SOCKET,CAM
713-067673-002PIN
714-045744-008LINER,CANTILVR,OOUR LNR MNT.23
839-802923-006ASS,WINDOW VIEW PORT
713-082885-002SPCR PTFE,SGI
719-333020-010PKG,SHIM,ANTI-WALK,BOT,RING
715-042721-810LINER,SYM, HI FLOW, 2300
714-045743-809LINER,FIXED OUTR,ACME,2300
715-801021-012metal chamber liner
715-042721-885LINER,SYM,HI FLOW,2300,SRC
715-045710-828DOOR,SYM,CHMBR,2300
713-085131-001TUBE,TEFLON,.25 0D,LINER 2300
713-065829-001COV,SCRW,SRC LINR
839-033318-001Al Liner chamber upper
715-330987-401接地环
716-080973-404上边缘环
857-027108-001KIT CHOKE RING
713-066269-002RING GUARD ABE
713-073439-010GSKT HEAT INSULATER
857-073710-002CIRLEX GASKET
713-072792-003GSKT GUARD OUTER ELCTD
713-069935-003GSKET GUARD OUTER ELCTD
857-072806-005KIT GASKET ELCTD
857-073299-001KIT GASKET TOP ELCTD
857-065064-003KIT GASKET ABE
857-065064-004KIT GASKET ABE
714-045219-008RING CHOKE, INR
714-059445-010RING CHOKE OUTER ELCTD
714-059445-025RING CHOKE OUTER ELCTD
714-072727-040HEATING JACKET_RING, HEATSINK, HE/COUPLING, RING, REV1
714-072727-048HEATING JACKET_RING, HEATSINK, HE/COUPLING, RING, REV2
714-072728-003HEAT INSULATOR_RING, HEATSINK, ESC/COUPLING
857-084241-010KIT GASKET ROUND_MONO TALON
857-072806-012KIT GASKET ELCTD
713-034964-001WSHR,.417IDX1.00ODX
713-034964-018WSHR,.417IDX1.125 ODX .050THK. 300mm
713-034965-001PAD,R,CONF,.010THK
713-034965-002PAD,R,CONF,.025THK. 300mm
713-027299-002SLV,ADPTR,SLIP-ON
713-027299-004SLV,ADPTR,SLIP-ON,SI CARB
713-040539-001PED, LNDNG, CONFR, PEEK, F6
839-039317-003ASSY, RTNR, SPR TL, 300M, FLEX
839-039317-115ASSY, RTNR, SPR TL, 300M, FLEX
713-043042-001COV, DIN, PED LNDG
713-037069-003HANGER,3R,.025,.08-,10-,12,TL RTNR
713-037072-007ASSY, RTNR, SPR TL, 300M
713-037072-020HANGER,2 PIECE
716-037072-508HANGER,4R,.025,.08-,08-,12,12
713-083166-001SLV, ALGIN, INNER ELCTD
713-067673-002PIN_PIN,ALIGN,UPR ELCTD, 300MM
839-070842-004OUTER ELECTRODE STUD Socket
839-070842-005ELECTRODE STUD Socket
716-038612-003PIN,PICK UP,DC,BIAS,SI CARBON
716-022030-004SLEEVE,QTZ,STEPPED,PIN,DC BIAS
719-078253-060GASKET GEL CER 509
857-027108-100KIT CHOKE RIMG TCP TO FL
713-083687-001SHIM SEAL RNG EDGF
714-072728-117RING ESC/CPLNG 298 SP
857-073299-002KIT GASKET TOP ELCTD
857-085550-026Electrode Gasket
857-101101-001KIT SEAL Socket LAM
849-084805-025ASS'Y STUD Socket IN ELECTRODE 
839-086924-025ASS'Y STUD Socket IN ELECTRODE 
849-084805-021ASS'Y STUD Socket IN SHROUD
839-086924-021ASS'Y STUD Socket IN SHROUD
839-086924-020ASS'Y STUD Socket
839-086924-040ASS'Y STUD Socket IN ELECTRODE W/W
839-086924-041ASS'Y STUD Socket IN SHROUD   W/W
857-073299-004KIT,GASKET,TOP,ELCTD
857-073299-005KIT,GASKET,TOP,ELCTD
719-078253-017RKG GASKET GEL TER
719-078253-103PKG GASKET GEL CER WIDE
719-078253-210PKG, 1 HOLE, GASKET, GEL for Flex FSE
714-072728-119RING ESC/CPLNG 296
857-120208-010KIT GSKET THRM TPTOCHOKE
857-120209-009KIT GSKET THRM CHOKE TO HTR
857-120210-008KIT GSKET THRM HTR TO BP
857-120210-101KIT GSKET THRM HTR TO BP
714-072728-603RING HUSNK ESC-CPLNG TER
857-085550-822KIT GSKET ELCTD
857-129581-101KIT GSKET INTFC THRM GDP TO ELCTD
857-129581-102KIT GSKET INFC THRM OBP TO ELCTD
857-101101-002KIT SEAL Socket LAM
839-086924-045ASS'Y STUD Socket OUTER W/W
839-086924-046ASS'Y STUD Socket C-SHROUD W/W
839-086924-050ASS'Y STUD Socket INNER
839-086924-051ASS'Y STUD Socket OUTER
839-086924-052ASS'Y STUD Socket C-SHROUD
719-078253-109GEL Gasket
713-084628-061SHIM MTG ESC FULL
713-084628-062SHIM MTG ESC FULL
719-078253-103PKG GASKET GEL CER WIDE
714-072728-117Ceramic Coupling ring Brown
714-072728-130RING HTSKESC-CPLNG 300MM SP
857-120210-026KIT GSKT THRM HTR TO BP
857-120208-010KIT GSKET THRM TPTOCHOKE
857-120209-009KIT GSKET THRM CHOKE TO HTR
857-085550-039KIT GSKT ELCTD
839-086924-045ASS'Y STUD Socket OUTER W/W
839-086924-046ASS'Y STUD Socket C-SHROUD W/W
839-086924-050ASS'Y STUD Socket INNER
839-086924-051ASS'Y STUD Socket OUTER
839-086924-052ASS'Y STUD Socket C-SHROUD
719-078253-252PKG, GASKET, GEL, WIDE (Vended Type)
719-078253-242RING GASKET GEL OUTER
719-078253-241PKG GASKET GEL OUTER
719-078253-240RING GASKET GEL INNER
726-192783-004GASKET EMI WELDED ELG .078*15.0
726-192783-010GASKET EMI WELDED ELG .078*15.0
718-266604-001HX Cathode RF Gasket
839-086924-057ASSY, STUD Socket IE
839-086924-058ASSY, STUD Socket OE W/W
839-086924-059ASSY, STUD, Socket, C SHROUD W/W
857-085550-046KIT,GSKT,ELCTD Q pad
857-085550-305KIT,GSKT,ELCTD_CIP
857-120210-302GRAFOIL GASKET
857-120209-305GRAFOIL GASKET
713-185433-182INSUL,RF FEED ROD,HER
713-185433-111INSUL,RF FEED ROD,HER
713-185433-119INSUL,RF FEED ROD,HER
713-185433-123INSUL,RF FEED ROD,HER
713-185433-216INSUL, PULL DOWN
713-185433-220INSUL, PULL DOWN
713-185433-224INSUL, PULL DOWN,ROD
713-185433-321INSUL, PULL DOWN
719-185433-502PKG,SCREW,PULL DOWN,ROD
719-185433-562PKG,SCREW,PULL DOWN,ROD
734-A06862-003SEAL,BARRIER,CR
734-A06862-007Barrier seal
839-086924-087ASSY, STUD Socket IE
839-086924-088ASSY, STUD Socket OE
839-086924-089ASSY, STUD Socket C SHROUD
839-086924-083ASSY, STUD Socket OUTER
716-082886-006UPPER CHAMBER___KIYOEX SIDE GAS IN
713-085131-001TUBE TEFLON .2500. LINER, 2300
719-333020-010PKG SHIN ANTI WALK BOT RING
713-065829-001COVER_SRC LINER SCREW COVER_TEFLON
713-082885-002SPACER_TEFLON STG GAS INJECTOR SPA
713-082885-003SPACER_TEFLON STG GAS INJECTOR SPA
713-027739-001OES LENS BARREL
713-189173-001DOOR LIFTER SLEEVE
739-273950-001GASKET EMI WELDED ELG .78*556
713-045792-005BSHG,DOOR LNKG,2300
713-254628-145SLV,HOLE,OUTER
713-254628-146SLV,HOLE,INNER,FLANGE
713-316810-001GDP GUIDE RING SHIM
713-048216-001CLIP,RETAINING, SYM DOOR
713-083166-002SLV, ALGIN, INNER ELCTD
716-073669-104RING,LARGE,CHOKE,FCTE,RDCD
716-073668-103RING,SMALL,CHOKE,FCTE,RDCD
713-107151-003Ring Gasket
739-041591-005EMI Gasket
718-102757-001EMI Gasket



TELYANDONG-001SLIT..EXT PLATE
YANDONG-002slit line
YANDONG-003Cover screw Aluminum
YANDONG-004wall aluminum chamber(UP)
YANDONG-005wall aluminum chamber(LOW)
1810-121085-16shield depo ALUMINUM(PC1)
1810-223352-11COVER Wall CHAMBER BOTTOM(GND)
YANDONG-006EPD window
YANDONG-007Upper holder E
1810-324309-11bellows cover B
3D10-404449-11PROCESS KIT_SHEET,OUTER COOLING PLATE
2L80-000271-11ACCESSORY_TUBE SPIRAL E01M24AT
1802-420160-11EMI GASKET
047-001162-1EMI GASKET
047-005419-1EMI GASKET
047-005420-1EMI GASKET
047-004452-1EMI GASKET
047-005412-1EMI GASKET
047-004186-1EMI GASKET
047-004416-1EMI GASKET
047-005405-1EMI GASKET
047-005908-1EMI GASKET
047-003069-1EMI GASKET
2L10-355271-11POLIMER GASKET
2L10-355273-11POLIMER GASKET
2L10-355059-11POLIMER GASKET
2L10-360138-11POLIMER GASKET
1D99-190416-11GEL GASKET
2L10-514037-11LEAF PLATE, SPRING



AMEC710-00319-006PAN HEAD SCREW PHILLIPS,M3X6
615-00784-010WASHER, M4, TH0.5,OD7; AL 1100-O
625-02290-001GRAPHITE SHIM RING, FOR BP/MB; HD-RIE
625-02290-003GRAPHITE SHIM RING
625-02290-101GRAPHITE SHIM RING
615-00784-003WASHER,M4 TH11.4MM;AL 6061-T6
625-00407-001PEEK GASKET
625-00407-021PEEK GASKET
625-00407-030PEEK GASKET
640-00159-005SCREW,NO VENT,S/H 3X44



NAURA10110-652599D内衬_300_D(Liner)
10110-652600C内门_300_D(Inner door)
10010-010720E匀流腔装配-B(Gas Uniform Ring)
60201-000032AEMI Gasket



ASM1041-544-01Aluminium LTO SUS Heater_DCM Heat,ALD,XP8 DCM


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