| 品牌 | 料号 | 描述 |
| AMAT | 0200-01820 | INSERT RING NM,200MM,NOTCH(2) SI/QTZ,EMAX |
| 0200-02385 | INSERT RING NM,200MM,L-SHAPE,1.5MM,NOTCH,200M EMAX | |
| 0200-03233 | L COLLAR,COLUMNAR,SI,1.5MM STEP,300MM IA | |
| 0200-07761 | PIN ANTENNA POLI SI 300MM PCII | |
| 0200-03736 | COLLAR 300mm 5.4mm PRODUCER ETCH | |
| 0200-01509 | INSERT RING NM,200MM,NOTCH(2)TG,SUPER-E | |
| 0200-01511 | TOP RING NM,200MM OXIDE | |
| 0200-17137 | SiC INSERT, SMOD, 2.8 STEP | |
| 0200-35362 | SILICON INSERT CHAMBER REFLECTOR RTP CHAMBER | |
| 0200-18497 | SiC Ring | |
| 0200-26170 | SiC Ring | |
| 0200-26221 | SiC Ring | |
| TEL | 3D10-202489-11 | DRM FOCUS RING |
| 2L10-252017-11 | RING,FOCUS 360-T12.1 ATCC.. | |
| 2L10-251162-11 | RING(L),SI GND STEP V2E | |
| 2L10-251978-11 | RING，FOCUS AD360-297 | |
| 2L10-250520-11 | CEL,CL380-364-0.5(PH)V2 | |
| 2L10-253833-11 | RING(L),SI GND VIX-54 | |
| 2L10-508401-11 | focus ring | |
| 2L10-255013-11 | RING(LAB),FOCUS 360-T3.4 MP | |
| 2L10-360138-11 | SHEET,SMX-8359 ATCC MP | |
| 2L10-504542-11 | D Ring | |
| 2L10-509921-11 | GND | |
| 2L10-507728-21 | CEL | |
| 3D10-201448-21 | TEL sccm jin focus ring for Nor65 CT-ET | |
| 3D10-251193-21 | FOCUS RING,360-302-C | |
| 3D10-250203-11 | RING,GND GROOVE,FG8 | |
| 3D10-302020-11 | CEL,OX T10-75-C912 | |
| 1D10-350674-F1 | RING,Focus N(LLD) | |
| 1810-121923-11 | CEL 320-T5*5-215-75 | |
| 1810-329523-11 | Focus Ring（SCCM） | |
| 1810-121988-11 | CEL(SCCM Upper Electrode) | |
| 1810-225123-11 | FOCUS RING N(D260) RUBBERLESS | |
| 3D10-250318-11 | RING,FOCUS.AD360-298 | |
| 6105-100024-11(SD1) | 12" POLY BOAT (197S) | |
| 5105-100281-11_TILT | 12" SHORT BOAT 2(TEL-144S) | |
| 5105-100246-11 | 12" LONG BOAT 2(197S) | |
| 5105-100150-11(U1) | 12" SHORT BOAT MODIFY(144S,2) | |
| 5105-100150-11(U) | 12" SHORT BOAT MODIFY(144S) | |
| 5105-100150-11(S) | SIC BOAT12"(TEL)-modify(slot) | |
| 5105-100150-11(S) | SIC BOAT12"(TEL)-modify(slot) | |
| 3805-120042-B1 | 12" FORMULA BOAT | |
| 3805-120042-B1 | FORMULA SIC BOAT | |
| 2105-220726-91 | PEDESTAL NITRIDE | |
| 2105-122199-B1(U) | SIC BOAT (5LOT) | |
| 2105-120850-12 REV.A | TEL 12" SiC BOAT | |
| 2105-120850-11(S) | SIC BOAT 12"(TEL)-SHORT (117slot) | |
| 2105-120850-11(S) | SIC BOAT 12"(TEL)-SHORT (117slot)(00N) | |
| 2105-120850-11(S) | SIC BOAT 12"(TEL) | |
| 2105-120850-11(M2) | 12" SHORT BOAT(TEL-144S) | |
| 2105-120850-11(M2) | TEL SHORT BOAT 12"(144SLOT) | |
| 2105-120850-11 | SIC BOAT 12" | |
| 2105-120850-11 | SIC BOAT 12"(TEL 125SLOT) | |
| 1105-100477-12 | SiC HEAT INSULATING MOULD COVER | |
| 1105-100261-1L | 8' BOAT (153S) | |
| 1105-100261-1L | SIC BOAT 803C-5.2mm | |
| 1105-100251-12 | 8" BOAT(TEL-170S) | |
| 1105-200660-12 | 12" COVER(122L) | |
| 3D10-250318-11SIC | SIC SHIN FOCUS RING 4T | |
| 3D10-201448-11 | SI FOCUS RING(TE MODIFY) | |
| 2L10-254186-21 | FOCUS RING (SIC) - CVD SIC | |
| 2L10-254186-21 | SiC FOCUS RING ( HR ) | |
| 2L10-251061-21(SIC) | VIGUS SIC FOCUS RING | |
| 2105-321162-11 | SIC LARGE 8 FINS | |
| 2105-321162-11 | SIC SMALL 4 FINS | |
| 1D10-302209-15 | 84 DRM FOCUS RING | |
| 2105-321298-11(SIC) | TUBE_TEL NIT SIC INNER TUBE | |
| 2105-321288-11(S) | TUBE-INNER | |
| 2105-321288-11 | 12" INNER TUBE(POLY-1,340L) | |
| 2105-321159-51(U2) | 12" TEL INNER TUBE ( FLANGE TYPE ) | |
| 1105-301110-12 | TEL INNER TUBE (SKIRT TYPE-1265L) | |
| 1105-201362-12 | TEL 12" SiC LINER TUBE | |
| LAM | 716-082039-323 | P0035285 CRYO 16 CAM-OuterUE |
| 716-081665-885 | P0035286 CRYO 16 CAM-CSR | |
| 716-082039-322 | ELCTD,OUTER,FLAT,POLISHED,300MM | |
| 716-443086-301 | R,H EDGE,SI,SGL XTAL,H WALL,8'' | |
| 839-011907-111 | ELCTD,SILICON,8'',SM,HOLE,LR | |
| 716-443086-401 | R,H EDGE,SI,SGL XTAL,H WALL,8'' | |
| 716-140125-100 | BAFFLE,8'' SIC | |
| 716-044668-435 | I,HE,4XX ESC,W/O FLAT,300MM,SS | |
| 716-023013-007 | R,HE,38X ESC,RND,SGL XTL,30 | |
| 716-069688-022 | ELCTD,INR,SI,300MM | |
| 716-082039-001 | ELCTD,OUTER,.18 STEP,300MM | |
| 716-023013-007 | R,HE,38X ESC,RND,SGL XTL,30 | |
| 716-038612-003 | PIN,PICK UP,DC BIAS,SI CARB,FLEX45 | |
| 716-082039-003-H | ELCTD,OUTER,.10 STEP,300MM | |
| 716-044668-571 | RING,HE,W/O FLAT,SGL XTL,300mm | |
| 716-082039-003 | ELCTD,OUTER,.18 STEP,300MM | |
| 716-069688-076 | 0 | |
| 716-081665-842 | RING,C-SECTION,.10 SLOT,POLY SI | |
| 716-081665-254 | P0038886 HXE16 CAM -C-Shroud | |
| 716-230577-364 | EDGE RING 4-40,297MM,14.5D | |
| 716-082039-262 | P0038885 HXE 16 CAM -OUE | |
| 716-081665-874 | RING,C-SECTION,.10 SLOT,POLY SI | |
| AMEC | 625-00024-111 | WIDE GAP FOCUS RING,F60 |
| 625-00024-136-P02 | COVER RING, SILICON, LOW R,ETCH | |
| 625-00010-010 | SHOWER HEAD,CVD，DRIE | |
| 625-00024-002 | FOCUS RING, SILICON,LOW R,ETCH | |
| 625-00024-000 | SILICON CARBIDE RING | |
| 625-00010-007 | SHOWER HEAD,SI;SINGLE CRYSTAL SILICON | |
| 625-00184-023 | RING,UPPER GROUND,SIC 1.8MM | |
| KE | D5DP75605 | 8" SiC WING BOAT(KE) |
| D5DP36748-000(S) | WING BOAT(KE-120S) | |
| D5DP36748(U),SIC | WING BOAT | |
| D5DP30515 REV.3 | 12" SiC WING BOAT(KE-120 GROOVES) | |
| D5DP30040(S) | 12" ANNEL BOAT(KE-130S) | |
| D5DP15670 | Anneal_SIC_Wing Boat(KE-95S) | |
| D5DN43287(U5) | BOAT (KE-148S) | |
| D5DN43287(U4) | ANNEAL 12" BOAT(KE-120S) | |
| D5DN43287(U) | 12" ANNEAL BOAT(KE-142S) | |
| D5DN43287(S) | 12" ANNEAL BOAT(KE-120S) | |
| D5DN43287 | 12" SIC BOAT(KE-143S) | |
| D5DN43287 | 12" ANNEL BOAT(KE-120S) | |
| D5CS41563(S) | SIC BOAT(KE CLS-169S,2도) | |
| D5CS41563(S) | 12" LONG BOAT 2(KE CLS-169S) | |
| D5CS23632 | SiC BOAT(KE CLS) | |
| D5CP98043 | BOAT(KE CLS) | |
| D5CP13153(U5) | 12" ALD BOAT(KE-133S) | |
| D5CP13153(U5) | ALD BOAT (KE-133S) MODIFY | |
| D5CP06119 | 12" SIC BOAT(QUIXACE)(KE CLS-89S) | |
| D5CN65713-1_M1 | LONG BOAT 12"(KE CLS -143s)_M1 | |
| D5CN65713-1 | 12" LONG BOAT(KE CLS-143S) | |
| D5CN65713(U) | BOAT(KE CLS-143S) | |
| D5CN47570(U5) | 12" LONG BOAT 2도(KE CLS-137S) | |
| D5CN47570(U4) | SiC BOAT 12"(KE CLS-143S） | |
| D5CN47570(U4) | 12" LONG BOAT 2(KE CLS-143S) | |
| D5CN47570(U3) | SiC BOAT 12"(KE CLS) | |
| D5CN47570(S) | SiC BOAT 12"(KE CLS) | |
| D5CN47570 | SiC BOAT RECOATING (수리) | |
| D5CN47570 | 12" LONG BOAT(KE CLS-137S) | |
| D1DN88635 | 6" SiC BOAT(KE-172 GROOVES) | |
| D1DN82712-1,D2CM88349-1 | D-POLY SIC BOAT 12"(KE CLS) - HOLDER | |
| D1DN82712(U) | D-POLY SIC BOAT 12" (KE-120S) | |
| D1DN76806 | 8" SiC BOAT(KE-172 GROOVES) | |
| D1DN76806 | 8" SiC BOAT(KE-172 GROOVES) | |
| D1DN08410-001 | 8" SiC BOAT(KE-141 GROOVES) | |
| D1DN08410-001 | 8" SiC BOAT(KE-141 SLOT) | |
| D1DN07912 REV.1 | 8" WING BOAT(KE-172S) | |
| D1DL47333 | SIC BOAT(KE) | |
| D1DL18998J-0 | 8"SIC BOAT(BL-5.2)(KE-152S) | |
| D1DL18998J | 8" BOAT(KE-172S) | |
| D1CN62266_M4 | MINI SIC BOAT(KE CLS-65S_50) | |
| D1CN62266_M3 | 12" MINI BOAT(KE CLS-93S) | |
| D1CN62266_M3 | MINI SIC BOAT(KE CLS-93S_75) | |
| D1CM03119 | SiC BOAT(KE CLS) | |
| D1CL19078J-0 | SIC BOAT(B-5.2)(KE-171S) | |
| D3DM69039(SIC) | KE CAP SIC TC(CVD COAT) | |
| D3DM69039 REV.3 | 8" SiC CAP TC(KE) | |
| D3DL07172J | 8" CAP(KE-163L) | |
| D2DM98320(S) | 12" CAP(KE-122L) | |
| D2DM98320 REV.2 | 12" SiC CAP(KE) | |
| D1CM88349(U) | SIC HOLDER(KE) | |
| D4DN09970 | SIC PIN2(KE) | |
| D4DN09970 | SIC PIN 23M(KE) | |
| D4DK45941J-1 | SIC POSITION PIN(KE, 8") | |
| D4DK45941J-1 | SIC POSITION PIN CVD (KE, 8") | |
| D4DK45941(S) | SIC PIN(KE) | |
| D4CM66615(SIC) | SIC PIN(KE) | |
| D4CM66615(S) | SIC BOLT(KE) | |
| D3CN23686 | Boat Fix Ring(SiC) | |
| D5CN474570 | TUBE COATING | |
| D5CN35516-M1 | SIC NIT TUBE [KE-T/C ] | |
| D5CN35516-M1 | SIC NIT TUBE [KE-T/C ]Rev.1 | |
| D3DM79041(S) | 12" LINER TUBE(KE-1,269L) | |
| D3DL18914J-0 | 8" INNER TUBE(KE-1,316L) | |
| D3DK79141-001 | 8" LINER TUBE(KE-1,266L) | |
| D3DK79141(SIC) | 8" LINER TUBE(KE-1,266L) | |
| D3DK79139(U) | SiC INNER TUBE(KE-1157)-5L | |
| D3DK79139 | SIC INNER TUBE(KE-NIT-10L) | |
| D3CL19077J-0 | SIC INNER TUBE(KE) | |
| D3CL19032J-O | SIC INNER TUBE (KE-L/L) | |
| D2DM60172 | LINER TUBE | |
| D2CM68108(S) | INNER TUBE (KE-N/T) |
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